|
规格(mm)
|
测量面对基面垂直度
(um) |
测量面平面度或直线度
(um) |
基面平面度或直线度
(um) |
|||
|
精度等级
|
||||||
|
00
|
0
|
00
|
0
|
00
|
0
|
|
|
100×63
|
2
|
4
|
1
|
1
|
1
|
1
|
|
160×100
|
2
|
4
|
1
|
2
|
1
|
1
|
|
250×160
|
2.5
|
5
|
1
|
2
|
1
|
2
|
|
400×250
|
3.5
|
7
|
1
|
2.5
|
1
|
2
|
|
630×400
|
4.5
|
9
|
1.5
|
3
|
1
|
2.5
|
|
800×500 |
5
|
10 |
2 |
4 |
1.2 |
3 |
|
1000×630 |
6 |
12 |
2.5 |
5 |
1.5 |
3 |